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Precipitate Formation in Heavily Al-Doped 4H-SiC Layers

Author(s):
Linnarsson, M.K.
Persson, P.O.A.
Bleichner, H.
Janson, M.
Zimmermann, U.
Andersson, H.
Karlsson, S.
Yakimova, R.
Hultman, L.
Svensson, B.G.
5 more
Publication title:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000
Title of ser.:
Materials science forum
Ser. no.:
353-356
Pub. Year:
2001
Page(from):
583
Page(to):
586
Pages:
4
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498734 [0878498737]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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