Novel Noninvasive Methodology for Characterization of Packaging for MEMS Inertial Sensors

Novel Noninvasive Methodology for Characterization of Packaging for MEMS Inertial Sensors

Author(s):

Pryputniewicz, Ryszard J. ( Worcester Polytechnic Institute )

Hefti, Peter

Klempner, Adam R.

Furlong, Cosme

Marinis, Thomas F. ( Draper Laboratory )

Soucy, Joseph W.

1 more

Publication title:

Proceedings, 2003 International Symposium on Microelectronics, November 18-20, 2003, Hynes Convention Center, Boston, Massa Massachusetts, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5288

Pub. Year:

2003

Page(from):

392

Page(to):

397

Pages:

6

Pub. info.:

Reston, Va.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819451897 [0819451894]

Language:

English

Call no.:

P63600/5288

Type:

Conference Proceedings

Details

TDL ID:	ZA00013172
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Microelectronics
Conf. info. (Number):	2003
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2003.11.18-2003.11.20

Similar Items:

1 Conference Proceedings Time-Lapse Measurements of Creep in Au-Sn Die Bonds Ryan Marinis, Adam Klempner, Peter Hefti, Ryszard Pryputniewicz, Thomas Marinis, Joseph Soucy Materials Research Society	7 Conference Proceedings Analytical and Experimental Characterization of an Optical MEMS Device Pryputniewicz, Ryszard J., Furlong, Cosme, Pryputniewicz, Emily J. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Vacuum Packaging of MEMS Inertial Sensors Marinis, Thomas F., Soucy, Joseph W. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Computational and Experimental Approach to study of a Nanoindentation Process for MEMS Furlong, Cosme, Pryputniewicz, Dariusz R., Pryputniewicz, Ryszard IMAPS
3 Conference Proceedings Confocal Optoelectronic Holography Microscope for Materials and Structural Characterization of MEMS Furlong, Cosme, Siegel, Adam M., Pryputniewicz, Ryszard J. Materials Research Society	9 Conference Proceedings Thermal Characterization of RF MEMS Relay Switch Design Pryputniewicz, Ryszard, J., Machate, Malgorzata S., Furlong, Cosme, Rosato, David SPIE-The International Society for Optical Engineering
4 Conference Proceedings Development of a Wireless MEMS Inertial System for Health Monitoring of Structures Kok, Ronald, Furlong, Cosme, Pryputniewicz, Ryszard J. Materials Research Society	10 Conference Proceedings Hybrid Approach to Thermal Management of a FET Power Amplifier Pryputniewicz, Ryszard J., Furlong, Cosme, Rosato, David, Pryputniewicz, Dariusz R. SPIE-The International Society for Optical Engineering
5 Conference Proceedings An Approach to MEM Sensor Array Packaging Soucy,Joseph W., Haley,Jason F., Marinis,Thomas F. IMAPS	11 Conference Proceedings Measurement of Shape and Deformation of MEMS at the Wafer Level Furlong, Cosme, Ferguson, Curtis F., Melson, Michael J., Pryputniewicz, Ryszard J. Materials Research Society
6 Conference Proceedings Computational and Experimental Approach to Thermal Management in Microelectronics and Packaging Furlong,Cosme, Pryputniewicz,Ryszard J. IMAPS	12 Conference Proceedings Development of Optoelectronic Holography Techniques for Nondestructive Evaluation of MEMS at the Wafer Level Furlong, Cosme, Ferguson, Curtis F., Melson, Michael J., Pryputniewicz, Ryszard J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12