A single-crystal piezoelectric scanner for scanning probe microscopy

A single-crystal piezoelectric scanner for scanning probe microscopy

Author(s):

Moon, K. S. ( Michigan Technological Univ. (USA) )
Hong, Y. K.
Lee, S.-Q ( Electronics and Telecommunications Research Institute (South Korea) )

Publication title:

Optomechatronic Systems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5264

Pub. Year:

2003

Page(from):

186

Page(to):

193

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819451521 [0819451525]

Language:

English

Call no.:

P63600/5264

Type:

Conference Proceedings

Details

TDL ID:	ZA00013170
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Optomechatronic Systems
Conf. info. (Number):	2003 : 4th
Conf. info. (Venue):	Providence, RI, USA
Conf. info. (Date):	2003.10.28-2003.10.29

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