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Large-area definition of nanoelectrodes by nanoimprint lithography

Author(s):
Wissen, M. ( Univ. of Wuppertal (Germany) )
Scheer, H.-C.
Schulz, H.
Horstmann, J. T. ( Univ. of Dortmund (Germany) )
Scherff, M. ( Univ. of Hagen (Germany) )
Fahrner, W. R.
1 more
Publication title:
Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5253
Pub. Year:
2003
Page(from):
122
Page(to):
129
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819451378 [0819451371]
Language:
English
Call no.:
P63600/5253
Type:
Conference Proceedings

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