Fabrication of micro-optical elements on a glass surface by imprint lithography
- Author(s):
- Yamaguchi, T. ( Nalux Co., Ltd. (Japan) )
- Yao, K.
- Kanakugi, T. ( Osaka Prefecture Univ. (Japan) )
- Kitagawa, S. ( Nalux Co., Ltd. (Japan) )
- Hirai, Y. ( Osaka Prefecture Univ. (Japan) )
- Publication title:
- Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5183
- Pub. Year:
- 2003
- Page(from):
- 163
- Page(to):
- 171
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450562 [0819450561]
- Language:
- English
- Call no.:
- P63600/5183
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Fabrication of micro-optical elements and biochip patterns on glass surface by imprint lithography
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Optical waveguide biosensor based on 2D diffractive elements obtained by nano-imprint lithography
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Fabrication technologies for micro-optical elements with arbitrary surfaces
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Technological aspects of deep proton lithography for the fabrication of micro-optical elements for photonics in computing applications
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Farbrication of diffractive optical elements on a Si chip by an imprint lithography using nonsymmetrical silicon mold
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Fabrication of nano and micro optical elements by step and flash imprint lithography (Invited Paper) [6110-20]
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
E-beam lithography:an efficient tool for the fabrication of diffractive and micro-optical elements
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Optical properties of ZnSe diffractive optical elements for spot array generation
SPIE-The International Society for Optical Engineering |