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Three-wavelength laser light source for absolute sub-Angstrom two-point-source interferometer

Author(s):
Publication title:
Optical Measurement Systems for Industrial Inspection III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5144
Pub. Year:
2003
Page(from):
227
Page(to):
233
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450142 [0819450146]
Language:
English
Call no.:
P63600/5144
Type:
Conference Proceedings

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