Three-wavelength laser light source for absolute sub-Angstrom two-point-source interferometer
- Author(s):
- Krieg, M.L. ( Technische Univ. Delft (Netherlands) )
- Parikesit, G. ( Technische Univ. Delft (Netherlands) )
- Braat, J.J.B. ( Technische Univ. Delft (Netherlands) )
- Publication title:
- Optical Measurement Systems for Industrial Inspection III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5144
- Pub. Year:
- 2003
- Page(from):
- 227
- Page(to):
- 233
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450142 [0819450146]
- Language:
- English
- Call no.:
- P63600/5144
- Type:
- Conference Proceedings
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