Semiconductor Metrology Requirements over the Next 15 Years
- Author(s):
- Diebold, A.C.
- Publication title:
- Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5133
- Pub. Year:
- 2003
- Page(from):
- 409
- Page(to):
- 419
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449993 [0819449997]
- Language:
- English
- Call no.:
- P63600/5133
- Type:
- Conference Proceedings
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