TXRF Characterization of Inhomogneous Solids: Influence of Surface Morphology

TXRF Characterization of Inhomogneous Solids: Influence of Surface Morphology

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5133

Pub. Year:

2003

Page(from):

129

Page(to):

135

Pages:

7

Pub. info.:

Pennington, NJ: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449993 [0819449997]

Language:

English

Call no.:

P63600/5133

Type:

Conference Proceedings

Details

TDL ID:	ZA00013121
Series ID:	PA00000029
Conf. info. (Name):	ALTECH 2003 : Analytical Techniques for Semiconductor Materials and Process Characterization IV ; Meeting of the Electrochemical Society : Diagnostic Techniques for Semiconductor Materials and Devices VI
Conf. info. (Number):	2003 : 4th ; 202nd : 6th
Conf. info. (Venue):	Paris, France ; Salt Lake City, UT, USA
Conf. info. (Date):	2003.04.00 ; 2002.10.00

Similar Items:

1 Conference Proceedings TXRF Characterization of Inhomogneous Solids: Influence of Surface Morphology Alov, N., Oskolok, K., Wittershagen, A., Kolbesen, B.O. Electrochemical Society	7 Conference Proceedings Analysis of time dependent haze on silicon surfaces Muenter, N., Kolbesen, B.O., Storm, W., Mueller, T. Electrochemical Society
2 Conference Proceedings Preparation and Characterization of Time Dependent Haze Munter,N., Kolbesen,B.O., Storm,W. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Charging Effects on Ferroelectric SBT Thin Films Imaged by Non-Contact Electrostatic Force Microscopy Junghans, N., Kolbesen, B.O. Electrochemical Society
3 Conference Proceedings TXRF and radiochemical analysis. A comparison of two analytical tools for determination of metal impurities on silicon surfaces Fester, A., Metz, S., Mainka, G., Angelkort, C., Martin, A.R., Herrmann, H., Kolbesen, B.O. Electrochemical Society	9 Conference Proceedings Charging Effects on Ferroelectric SBT Thin Films Imaged by Non-Contact Electrostatic Force Microscopy Junghans, N., Kolbesen, B.O. SPIE-The International Society for Optical Engineering
4 Conference Proceedings New materials in future memories: high temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and elymat Kilian, G., Kolbesen, B.O., Rommel, M., Pamler, W., Unger, E., Hoepfner, A. Electrochemical Society	10 Conference Proceedings VPD-DSE-studies of metal impurities on silicon: A comparison of TXRF and radiochemical analysis Metz, S., Kilian, G., Mainka, G., Angelkort, C., Rittmeyer, C., Stelter, H., Fester, A., Kolbesen, B.O. Electrochemical Society
5 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy Doll, O., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Influence of copper on the oxide growth of Si Boerner, M., Landau, S., Metz, S., Kolbesen, B.O. Electrochemical Society
6 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UVIVIS-Spectroscopy Doll, O., Kolbesen, B.O. Electrochemical Society	12 Conference Proceedings Process-Induced Defects in Silicon: A Never Ending Story? Kolbesen, B.O., Cerva, H. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12