Dependence of pattern printability on thicknesses of absorber and cap layers of Mo/Si mask blank for EUV lithography
- Author(s):
- Sugawara, M. ( Association of Super-Advanced Electronics Technologies (Japan) )
- Chiba, A. ( Association of Super-Advanced Electronics Technologies (Japan) )
- Yamanashi, H. ( Association of Super-Advanced Electronics Technologies (Japan) )
- Nishiyama, I. ( Association of Super-Advanced Electronics Technologies (Japan) )
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5130
- Pub. Year:
- 2003
- Page(from):
- 1046
- Page(to):
- 1054
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449962 [0819449962]
- Language:
- English
- Call no.:
- P63600/5130
- Type:
- Conference Proceedings
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