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Enhanced flexible mask specifications

Author(s):
Hasebe, S. ( Toshiba Corp. (Japan) )
Nojima, S. ( Toshiba Corp. (Japan) )
Mimotogi, S. ( Toshiba Corp. (Japan) )
Tanaka, S. ( Toshiba Corp. (Japan) )
Ikenaga, O. ( Toshiba Corp. (Japan) )
Hashimoto, K. ( Toshiba Corp. (Japan) )
Inoue, S. ( Toshiba Corp. (Japan) )
Mori, I. ( Toshiba Corp. (Japan) )
3 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5130
Pub. Year:
2003
Page(from):
593
Page(to):
599
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449962 [0819449962]
Language:
English
Call no.:
P63600/5130
Type:
Conference Proceedings

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