Advanced FIB mask repair technology for 100-nm/ArF lithography: II
- Author(s):
Hagiwara, R. ( Seiko Instruments, Inc. (Japan) ) Yasaka, A. ( Seiko Instruments, Inc. (Japan) ) Aita, K. ( Seiko Instruments, Inc. (Japan) ) Takaoka, O. ( Seiko Instruments, Inc. (Japan) ) Koyama, Y. ( Seiko Instruments, Inc. (Japan) ) Kozakai, T. ( Seiko Instruments, Inc. (Japan) ) Doi, T. ( Seiko Instruments, Inc. (Japan) ) Muramatsu, M. ( Seiko Instruments, Inc. (Japan) ) Suzuki, K. ( Seiko Instruments, Inc. (Japan) ) Sugiyama, Y. ( Seiko Instruments, Inc. (Japan) ) Matsuda, O. ( Seiko Instruments, Inc. (Japan) ) Okabe, M. ( Seiko Instruments, Inc. (Japan) ) Shinohara, S. ( Seiko Instruments, Inc. (Japan) ) Hasuda, M. ( Seiko Instruments, Inc. (Japan) ) Adachi, T. ( Seiko Instruments, Inc. (Japan) ) Morikawa, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Nishiguchi, M. ( Dai Nippon Printing Co., Ltd. (Japan) ) Sato, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) ) Ozawa, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) - Publication title:
- Photomask and Next-Generation Lithography Mask Technology X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5130
- Pub. Year:
- 2003
- Page(from):
- 510
- Page(to):
- 519
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449962 [0819449962]
- Language:
- English
- Call no.:
- P63600/5130
- Type:
- Conference Proceedings
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