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Computer simulation of the creation of 31P-doped layer in 28Si/30Si/28Si heterostructure by neutron transmutation doping

Author(s):
Trushin, Y.V. ( A.F. Ioffe Physico-Technical Institute (Russia) )
Mikhailov, G.V. ( A.F. Ioffe Physico-Technical Institute (Russia) )
Zhurkin, E.E. ( St. Petersburg State Technical Univ. (Russia) )
Kharlamov, V.S. ( A.F. Ioffe Physico-Technical Institute (Russia) )
Schmidt, A.A. ( St. Petersburg State Technical Univ. (Russia) )
Krusenstern, F.A. ( St. Petersburg State Technical Univ. (Russia) )
1 more
Publication title:
Sixth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering : 10-16 June, 2002, St. Petersburg, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5127
Pub. Year:
2003
Page(from):
124
Page(to):
127
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449870 [0819449873]
Language:
English
Call no.:
P63600/5127
Type:
Conference Proceedings

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