Laser technology of SNOM-tips fabrication: process diagnostics, processing, and testing
- Author(s):
- Veiko, V.P. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Kalachev, A.N. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Kaporsky, L.N. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Volkov, S.A. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Voznesensky, N.B. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Publication title:
- Laser Processing of Advanced Materials and Laser Microtechnologies
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5121
- Pub. Year:
- 2003
- Page(from):
- 164
- Page(to):
- 174
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449818 [0819449814]
- Language:
- English
- Call no.:
- P63600/5121
- Type:
- Conference Proceedings
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