Semiconductor gas sensor compatibility with CMOS technologies
- Author(s):
Lopez-Bosque, M.J. ( Ctr. Nacional de Microelectronica (Spain) ) Plaza, J.A. ( Ctr. Nacional de Microelectronica (Spain) ) Santander, J. ( Ctr. Nacional de Microelectronica (Spain) ) Gracia, I. ( Ctr. Nacional de Microelectronica (Spain) ) Cane, C. ( Ctr. Nacional de Microelectronica (Spain) ) Wollenstein, J. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) ) Moretton, E. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) ) Lambrecht, A. ( Fraunhofer-Institut fur Physikalische Mebtechnik (Germany) ) Schjolberg-Henriksen, K. ( Univ. of Oslo (Norway) ) - Publication title:
- Smart Sensors, Actuators, and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5116
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 790
- Page(to):
- 801
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449764 [0819449768]
- Language:
- English
- Call no.:
- P63600/5116
- Type:
- Conference Proceedings
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