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Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

Author(s):
Fouchier, M. ( IMEC (Belgium) )
Eyben, P. ( IMEC (Belgium) )
Alvarez, D. ( Katholieke Univ. Leuven (Belgium) )
Duhayon, N. ( IMEC (Belgium) )
Xu, M.W. ( Katholeike Univ. Leuven (Belgium) )
Brongersma, S. ( IMEC (Belgium) )
Lisoni, J. ( IMEC (Belgium) )
Vandervorst, W. ( IMEC (Belgium) )
3 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
2
Pt.:
Session 10
Page(from):
607
Page(to):
616
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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