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Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactions

Author(s):
Koops, H.W.P. ( NaWoTec GmbH (Germany) )  
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
1
Pt.:
Session 7
Page(from):
393
Page(to):
401
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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