Compatibility of gas and flow sensor technology fabrication
- Author(s):
Sabate, N. ( Ctr. Nacional de Microelectronica (Spain) ) Gracia, I. ( Ctr. Nacional de Microelectronica (Spain) ) Cane, C. ( Ctr. Nacional de Microelectronica (Spain) ) Puigcorbe, J. ( Univ. de Barcelona (Spain) ) Cerda, J. ( Univ. de Barcelona (Spain) ) Morante, J.R. ( Univ. de Barcelona (Spain) ) Berganzo, J. ( IKERLAN (Spain) ) - Publication title:
- Smart Sensors, Actuators, and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5116
- Pub. Year:
- 2003
- Vol.:
- 1
- Pt.:
- Session 2
- Page(from):
- 120
- Page(to):
- 127
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449764 [0819449768]
- Language:
- English
- Call no.:
- P63600/5116
- Type:
- Conference Proceedings
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