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Compatibility of gas and flow sensor technology fabrication

Author(s):
Sabate, N. ( Ctr. Nacional de Microelectronica (Spain) )
Gracia, I. ( Ctr. Nacional de Microelectronica (Spain) )
Cane, C. ( Ctr. Nacional de Microelectronica (Spain) )
Puigcorbe, J. ( Univ. de Barcelona (Spain) )
Cerda, J. ( Univ. de Barcelona (Spain) )
Morante, J.R. ( Univ. de Barcelona (Spain) )
Berganzo, J. ( IKERLAN (Spain) )
2 more
Publication title:
Smart Sensors, Actuators, and MEMS
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
Pub. Year:
2003
Vol.:
1
Pt.:
Session 2
Page(from):
120
Page(to):
127
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
Language:
English
Call no.:
P63600/5116
Type:
Conference Proceedings

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