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Advancement of a MEMS photoacoustic chemical sensor

Author(s):
Publication title:
Chemical and biological sensing IV : 21-22 April, 2003, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5085
Pub. Year:
2003
Page(from):
52
Page(to):
63
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449443 [081944944X]
Language:
English
Call no.:
P63600/5085
Type:
Conference Proceedings

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