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Electron beam mastering process realizing over 100-GB/layer capacity disc

Author(s):
Takeda, M. ( Sony Corp. (Japan) )
Furuki, M. ( Sony Corp. (Japan) )
Yamamoto, M. ( Sony Corp. (Japan) )
Shinoda, M. ( Sony Corp. (Japan) )
Saito, K. ( Sony Corp. (Japan) )
Aki, Y. ( Sony Corp. (Japan) )
Kawase, H. ( Sony Corp. (Japan) )
Koizumi, M. ( JEOL Ltd. (Japan) )
Miyokawa, T. ( JEOL Ltd. (Japan) )
Mutou, M. ( JEOL Ltd. (Japan) )
5 more
Publication title:
Optical data storage 2003 : 11-14 May 2003, Vancouver, British Columbia, Canada
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5069
Pub. Year:
2003
Page(from):
209
Page(to):
214
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449283 [0819449288]
Language:
English
Call no.:
P63600/5069
Type:
Conference Proceedings

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