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Warpage measurement system with systematic error analysis

Author(s):
  • Qiu, Y. ( Tianjin Univ. (China) )
  • Ding, H. ( Georgia Institute of Technology (USA) )
  • Ume, I.C. ( Georgia Institute of Technology (USA) )
  • Kang, Y. ( Tianjin Univ. (China) )
Publication title:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5058
Pub. Year:
2003
Page(from):
627
Page(to):
632
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448644 [0819448648]
Language:
English
Call no.:
P63600/5058
Type:
Conference Proceedings

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