Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique
- Author(s):
- Song, I.-H. ( Louisiana State Univ. (USA) )
- Kopparthi, S. ( Louisiana State Univ. (USA) )
- Ajmera, P.K. ( Louisiana State Univ. (USA) )
- Srivastava, A. ( Louisiana State Univ. (USA) )
- Publication title:
- Smart structures and materials 2003 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 3-6 March 2003, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5055
- Pub. Year:
- 2003
- Page(from):
- 78
- Page(to):
- 86
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448606 [0819448605]
- Language:
- English
- Call no.:
- P63600/5055
- Type:
- Conference Proceedings
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