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Analysis of the influence of tiny mirrors and mechanical holder in the interferometric measurements of piezoceramic displacements operating in a kHz range

Author(s):
Publication title:
Smart structures and materials 2003 : Active materials : Behavior and mechanics : 3-6 March 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5053
Pub. Year:
2003
Page(from):
513
Page(to):
522
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448583 [0819448583]
Language:
English
Call no.:
P63600/5053
Type:
Conference Proceedings

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