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Nondestructive nanomechanical imaging: cross-sectional ultrasonic force microscopy of integrated circuit test structures (Invited Paper)

Author(s):
Publication title:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5045
Pub. Year:
2003
Page(from):
54
Page(to):
62
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448507 [0819448508]
Language:
English
Call no.:
P63600/5045
Type:
Conference Proceedings

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