Evaluating microdefect structures by AFM-based deformation measurement

Evaluating microdefect structures by AFM-based deformation measurement

Author(s):

Vogel, D. ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
Keller, J. ( Brandenburgische Technische Univ. Cottbus (Germany) )
Gollhardt, A. ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
Michel, B. ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )

Publication title:

Testing, Reliability, and Application of Micro- and Nano-Material Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5045

Pub. Year:

2003

Page(from):

1

Page(to):

12

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448507 [0819448508]

Language:

English

Call no.:

P63600/5045

Type:

Conference Proceedings

Details

TDL ID:	ZA00013036
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures : Testing, Reliability, and Application of Micro-and Nano-Material Systems
Conf. info. (Number):	2003
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.03.03-2003.03.05

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