Knowledge-based APC methodology for overlay control

Knowledge-based APC methodology for overlay control

Author(s):

Laidler, D.W. ( IMEC (Belgium) )
Leray, P. ( IMEC (Belgium) )
Crow, D.A. ( INFICON (USA) )
Roberts, K.E. ( INFICON (USA) )

Publication title:

Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5044

Pub. Year:

2003

Page(from):

32

Page(to):

43

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448491 [0819448494]

Language:

English

Call no.:

P63600/5044

Type:

Conference Proceedings

Details

TDL ID:	ZA00013035
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Advanced process control and automation
Conf. info. (Number):	2003
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.03.27

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