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Optimal model-predictive control of overlay lithography implemented in an ASIC fab

Author(s):
Middlebrooks, S.A. ( LSI Logic Corp. (USA) )  
Publication title:
Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5044
Pub. Year:
2003
Page(from):
12
Page(to):
23
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448491 [0819448494]
Language:
English
Call no.:
P63600/5044
Type:
Conference Proceedings

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