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Technology acceleration: the suppliers' challenge

Author(s):
Trybula, W.J. ( International SEMATECH (USA) )  
Publication title:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5043
Pub. Year:
2003
Page(from):
34
Page(to):
40
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448484 [0819448486]
Language:
English
Call no.:
P63600/5043
Type:
Conference Proceedings

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