Blank Cover Image

Statistical data assessment for optimization of data preparation and manufacturing

Author(s):
Publication title:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
Pub. Year:
2003
Page(from):
286
Page(to):
292
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
Language:
English
Call no.:
P63600/5042
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Optimization of the data preparation for variable-shape beam mask writing machines

Schulze, S.F., LaCour, P.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Model-based OPC considering process window aspects: a study

Schulze, S.F., Park, O., Zimmermann, R., Chen, M.-J., LaCour, P., Sahouria, E.Y., Granik, Y., Cobb, N.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Integration of OPC and mask data preparation

Schulze, S.F., LaCour, P.J., Rodriguez, N.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings An agile mask data preparation and writer dispatching approach

Hsu, C., Chen, Y.S., Hsin, S.C., Tuo, L.C., Schulze, S.F.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings GDS-based mask data preparation flow. Data volume containment by hierarchical data processing

Schulze, S.F., Lacour, P., Buck, P.D.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings OASIS-based unification of mask data representation

Sahouria, E.Y., Schulze, S.F.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings OASIS-based data preparation flows: progress report on containing data size explosion

Schulze, S.F., LaCour, P., Grodd, L.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Interaction of RET and MDP: optimization for reducing the mask writing time

Word, J., Schulze, S.F.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings New stream format: progress report on containing data size explosion

LaCour, P., Reich, A.J., Nakagawa, K.H., Schulze, S.F., Grodd, L.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Distributed processing in integrated data preparation flow

Schulze, S. F., Bailey, G. E.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Optimization of data handling prior to fracturing for reduction of mask writing time

Word, J., Schulze, S.F.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings A user-programmable link between data preparation and mask manufacturing equipment

W. Zhang, G. Davis, E. Sahouria, S. Schulze, M. Saad

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12