Compression algorithms for dummy-fill VLSI layout data
- Author(s):
- Ellis, R.B. ( Texas A&M Univ. (USA) )
- Kahng, A.B. ( Univ. of California/San Diego (USA) )
- Zheng, Y. ( Univ. of California/San Diego (USA) )
- Publication title:
- Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5042
- Pub. Year:
- 2003
- Page(from):
- 233
- Page(to):
- 245
- Pages:
- 13
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448477 [0819448478]
- Language:
- English
- Call no.:
- P63600/5042
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Automated layout and phase assignment techniques for dark-field alternating PSM
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Revisiting the layout decomposition problem for double patterning lithography
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Partial branch and bound algorithm for improved data association in multiframe processing
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Efficiency of microSIMD architectures and index-mapped data for media processors
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Toward performance-driven reduction of the cost of RET-based lithography control (Invited Paper)
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Monte-Carlo methods for chemical-mechanical planarization on multiple-layer and dual- material models
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Distributed sensing and probing with multiple search agents: toward system-level landmine detection solutions
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
Layout and EB data reduction: comparison of OASIS based approach with format-specific reversible compressions
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Training minimal artificial neural network architectures for subsoil object detection
Society of Photo-optical Instrumentation Engineers |