New stream format: progress report on containing data size explosion

New stream format: progress report on containing data size explosion

Author(s):

LaCour, P. ( Mentor Graphics Corp. (USA) )
Reich, A.J. ( Motorola, Inc. (USA) )
Nakagawa, K.H. ( DuPont Photomasks, Inc. (USA) )
Schulze, S.F. ( Mentor Graphics Corp. (USA) )
Grodd, L. ( Mentor Graphics Corp. (USA) )

Publication title:

Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5042

Pub. Year:

2003

Page(from):

214

Page(to):

221

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448477 [0819448478]

Language:

English

Call no.:

P63600/5042

Type:

Conference Proceedings

Details

TDL ID:	ZA00013033
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Design and process integration for microelectronic manufacturing
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.02.26-2003.02.28

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