Blank Cover Image

Investigation of product design weaknesses using model-based OPC sensitivity analysis

Author(s):
Postnikov, S.V. ( Motorola, Inc. (USA) )
Lucas, K. ( Motorola, Inc. (USA) )
Garza, C.M. ( Motorola, Inc. (USA) )
Wimmer, K. ( Motorola, Inc. (France) )
LaCour, P. ( Mentor Graphics Corp. (USA) )
Word, J.C. ( Integrated Device Technology, Inc. (USA) )
1 more
Publication title:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
Pub. Year:
2003
Page(from):
160
Page(to):
171
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
Language:
English
Call no.:
P63600/5042
Type:
Conference Proceedings

Similar Items:

Postnikov,S.V., Lucas,K., Wimmer,K.

SPIE-The International Society for Optical Engineering

Lucas,K.D., Word,J.C., Vandenberghe,G.N., Verhaegen,S., Jonckheere,R.M.

SPIE-The International Society for Optical Engineering

Lucas, K., Postnikov, S.V., Patterson, K., Yuan, C.-M., Thomas, C., Thompson, M.A., Carter, R., Litt, L.C., Montgomery, …

SPIE-The International Society for Optical Engineering

Lucas, K., Baron, S., Belledent, J., Boone, R., Borjon, A., Couderc, C., Patterson, K., Riviere-Cazaux, L., Rody, Y., …

SPIE - The International Society of Optical Engineering

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Bourov, A., Postnikov, S.V., Lucas, K.

SPIE-The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Wimmer, K., Ivin, V., Rogov, A.

SPIE-The International Society for Optical Engineering

Lucas, K.D., Yuan, C.-M., Boone, R., Strozewski, K., Porter, J., Tian, R., Wimmer, K., Cobb, J., Wilkinson, B., Toublan, …

SPIE - The International Society of Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Michelotti, A.C., da Silva, J.C.

Society of Automotive Engineers

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Sturtevant, J. L., Torres, J. A., Word, J., Granik, Y., LaCour, P.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12