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Semiconductor wafer defect detection using digital holography

Author(s):
Schulze, M.A. ( nLine Corp. (USA) )
Hunt, M.A. ( nLine Corp. (USA) )
Voelkl, E. ( nLine Corp. (USA) )
Hickson, J.D. ( nLine Corp. (USA) )
Usry, W.R. ( nLine Corp. (USA) )
Smith, R.G. ( nLine Corp. (USA) )
Bryant, R. ( nLine Corp. (USA) )
Thomas, C.E., Jr. ( nLine Corp. (USA) )
3 more
Publication title:
Process and Materials Characterization and Diagnostics in IC Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5041
Pub. Year:
2003
Page(from):
183
Page(to):
193
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448460 [081944846X]
Language:
English
Call no.:
P63600/5041
Type:
Conference Proceedings

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