COPs/particles discrimination using an automated surface inspection tool
- Author(s):
- Lorenzi, G. ( KLA-Tencor Italy (Italy) )
- Nguyen, K.H. ( KLA-Tencor Corp. (USA) )
- Sanna, C. ( MEMC Electronic Materials SpA (Italy) )
- Orizio, R. ( MEMC Electronic Materials SpA (Italy) )
- Borionetti, G. ( MEMC Electronic Materials SpA (Italy) )
- Publication title:
- Process and Materials Characterization and Diagnostics in IC Manufacturing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5041
- Pub. Year:
- 2003
- Page(from):
- 39
- Page(to):
- 49
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448460 [081944846X]
- Language:
- English
- Call no.:
- P63600/5041
- Type:
- Conference Proceedings
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