Blank Cover Image

Neural network based time series modeling of optical emission spectroscopy data for fault detection in reactive ion etching

Author(s):
  • Hong, S.J. ( Georgia Institute of Technology (USA) )
  • May, G.S. ( Georgia Institute of Technology (USA) )
Publication title:
Process and Materials Characterization and Diagnostics in IC Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5041
Pub. Year:
2003
Page(from):
1
Page(to):
8
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448460 [081944846X]
Language:
English
Call no.:
P63600/5041
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Automated fault detection and classification of etch systems using modular neural networks

Hong, S.J., May, G.S., Yamartino, J., Skumanich, A.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings SF6/O2 and CF4/O2 Reactive-Ion-Etching-Induced Defects in Silicon Studied by Photoluminescence Spectroscopy:Role of Oxygen

Buyanova,I.A., Henry,A., Monemar,B., Lindstrom,J.L., Sheinkman,M.K., Oehrlein,G.S.

Trans Tech Publications
2 Conference Proceedings Semi-empirical MOCVD modeling using neural networks

Z. Nami, A. Erbil, G.S. May

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Use of Laser Interferometry and Optical Emission Spectroscopy for Monitoring the Reactive Ion Etching of 6H - and 4H-SiC

Camara, N., Constantinidis, G., Zekentes, K.

Trans Tech Publications
3 Conference Proceedings Fault detection in a mechanical system by neural networks

M.D. Thomas, S.J. Flockton

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings REACTIVE ION ETCHING OF III-V SEMICONDUCTORS USING HYDROGENATED CHLOROFLUOROCARBON MIXTURES

Pearton, S.J., Hobson, W.S., Chakrabarti, U.K., Derkits, G.E., Perley, A.P.

Materials Research Society
4 Conference Proceedings Roughness/error trade-offs in neural network time series models

Gustafson,S.C., Little,G.R., Loomis,J.S., Tuthill,T.A.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Neural network coding for statistical time series prediction

Feist,J., Gutjahr,S.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings PHOTOLUMINESCENCE OF DEFECTS PRODUCED BY REACTIVE ION ETCHING OF SILICON.

NORTHROP,G.A., OEHRLEIN,G.S.

Trans Tech Publications
11 Conference Proceedings Application of Kohonen neural network for tool condition monitoring

Rahman,M., Zhou,Q., Hong,G.S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Magnetron Reactive Ion Etching of III-V Nitride Semiconductors

McLane, G.F., Pearton, S.J., Abernathy, C.R.

Electrochemical Society
12 Conference Proceedings REACTIVE ION ETCHING OF In-BASED III-V SEMICONDUCTORS COMPARISON OF Cl AND C2H6 CHEMISTRIES

Pearton, S.J., Chakrabarti, U.K., Baiocchi, F.A., Hobson, W.S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12