Spectral dynamics analysis of utlra-line-narrowed F2 laser

Spectral dynamics analysis of utlra-line-narrowed F2 laser

Author(s):

Kumazaki, T. ( Komatsu Ltd. (Japan) )

Wakabayashi, O. ( Komatsu Ltd. (Japan) )

Nohdomi, R. ( Gigaphoton Inc. (Japan) )

Ariga, T. ( Komatsu Ltd. (Japan) )

Watanabe, H. ( Gigaphoton Inc. (Japan) )

Hotta, K. ( Ushio Inc. (Japan) )

Mizoguchi, H. ( Gigaphoton Inc. (Japan) )

Tanaka, H. ( Kyushu Univ. (Japan) )

Takahashi, A. ( Kyushu Univ. (Japan) )

Okada, T. ( Kyushu Univ. (Japan) )

5 more

Publication title:

Optical Microlithography XVI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5040

Pub. Year:

2003

Vol.:

Part Three

Page(from):

1363

Page(to):

1370

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448453 [0819448451]

Language:

English

Call no.:

P63600/5040

Type:

Conference Proceedings

Details

TDL ID:	ZA00013031
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2003 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.02.25-2003.02.28

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