Evaluation of SCAA mask technology as a pathway to the 65-nm node
- Author(s):
- Beach, J.V. ( International SEMATECH (USA) )
- Petersen, J.S. ( Petersen Advanced Lithography, Inc. (USA) )
- Maslow, M.J. ( Petersen Advanced Lithography, Inc. (USA) )
- Gerold, D.J. ( Petersen Advanced Lithography, Inc. (USA) )
- McCafferty, D.C. ( ASML (USA) )
- Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part Two
- Page(from):
- 1103
- Page(to):
- 1114
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
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