Lithographic process optimization using process capability analysis
- Author(s):
- Wingerden, J. ( Philips Research Labs. (Belgium) )
- Dirksen, P. ( Philips Research Labs. (Belgium) )
- Juffermans, C.A.H. ( Philips Research Labs. (Belgium) )
- Trouiller, Y. ( CEA-LETI (France) )
- Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part Two
- Page(from):
- 882
- Page(to):
- 893
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
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