0.85-NA ArF exposure system and performances

0.85-NA ArF exposure system and performances

Author(s):

Kanda, T. ( Canon Inc. (Japan) )
Shiode, Y. ( Canon Inc. (Japan) )
Shinoda, K. ( Canon Inc. (Japan) )

Publication title:

Optical Microlithography XVI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5040

Pub. Year:

2003

Vol.:

Part Two

Page(from):

789

Page(to):

800

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448453 [0819448451]

Language:

English

Call no.:

P63600/5040

Type:

Conference Proceedings

Details

TDL ID:	ZA00013030
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2003 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2003.02.25-2003.02.28

Similar Items:

1 Conference Proceedings 0.85-NA ArF scanner: advancing features and performances Namba, A., Uzawa, S., Kotoku, K. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Recording power tolerance of magneto-optical media on RIE-formed substrate using NA 0.85 and 407-nm optics Miki,T., Sakamoto,T., Nakaoki,A., Yamamoto,M. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Improved Performance of La0.85Sr0.15MnO3 Cathodes by Sol-Gel Coatings Yoon, S.-P, Nam, S.-W., Lim, T.-H., Han, J., Hong, S.-A. Electrochemical Society	8 Conference Proceedings Effect of Crack Initiation Size on Fatigue Strength in 0.85% Carbon Steel C. Makabe, T. Miyazaki, N. Nakane, S. Yamazaki, T. Makishi Trans Tech Publications
3 Conference Proceedings Optical performance evaluation of hybrid micro lens with NA 0.85 for small form factor optical pickup [5966-74] Kim, W. -C., Yoon, C. -Y., Cho, E. -H., Song, T., Sohn, J. -S., Park, N. -C., Park, Y. -P SPIE - The International Society of Optical Engineering	9 Conference Proceedings Nonlinear coloration and damage of wide-gap glasses by femtosecond laser at 0.85ｦﾌm Efimov,O.M., Glebov,L.B., Garnov,S.V., Soileau,M.J., Richardson,M.C., Gaebel,K., Grantham,S.E. SPIE-The International Society for Optical Engineering
4 Conference Proceedings High-Temperature Deformation Behavior of (Mo_0.85Nb_0.15)Si₂ Crystals with C40/C11b Lamellar Microstructure K. Hagihara, H. Araki, T. Ikenishi, T. Nakano Trans Tech Publications	10 Conference Proceedings Large-format 0.85- and 2.5-μm HgCdTe detector arrays for low-background applications Love, P.J., Hoffman, A.W., Gulbransen, D.J., Murray, M.P., Ando, K.J., Therrien, N.J., Rosbeck, J.P., Holcombe, R.S. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Microstnicture and Electrical Conductivity of Ce0.85Y0.15-xREXO2-/ (RE=Pr,Tb) S. K. Tadokoro, E. N. Muccillo Electrochemical Society	11 Conference Proceedings High-Temperature Deformation Behavior of (Mo_0.85Nb_0.15)Si₂ Crystals with C40/C11_b Lamellar Microstructure K. Hagihara, H. Araki, T. Ikenishi, T. Nakano Trans Tech Publications
6 Conference Proceedings Impedance and Mott-Schottky Analysis of a Pr0.15Ce0.85O2-x Bouchet, R., Knauth, P., Stefanik, T., Tuller, H. L. Materials Research Society	12 Conference Proceedings Modeling of Lossy MOS Capacitors on Ge-Rich Si_0.15Ge_0.85 Substrates M.K. Bera, R. Das, S. Chakraborty, S. Saha, C.K. Maiti Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12