Immersion liquids for lithography in the deep ultraviolet
- Author(s):
Switkes, M. ( MIT Lincoln Lab. (USA) ) Kunz, R.R. ( MIT Lincoln Lab. (USA) ) Sinta, R.F. ( MIT Lincoln Lab. (USA) ) Rothschild, M. ( MIT Lincoln Lab. (USA) ) Gallagher-Wetmore, P.M. ( Phasex Corp. (USA) ) Krukonis, V.J. ( Phasex Corp. (USA) ) Williams, K. ( Phasex Corp. (USA) ) - Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part Two
- Page(from):
- 690
- Page(to):
- 699
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
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