Desirable wafer edge flatness for CD control in photolithography
- Author(s):
Fujisawa, T. ( Toshiba Corp. (Japan) ) Inoue, S. ( Toshiba Corp. (Japan) ) Hagiwara, T. ( Nikon Corp. (Japan) ) Kennichi, K. ( Nikon Corp. (Japan) ) Kobayashi, M. ( Shin-Etsu Handotai Co. Ltd. (Japan) ) Okumura, K. ( The Univ. of Tokyo (Japan) ) - Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part One
- Page(from):
- 600
- Page(to):
- 609
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
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