Rigorous simulation of exposure over nonplanar wafers
- Author(s):
Erdmann, A. ( Fraunhofer Institute of Integrated Systems and Device Technology (Germany) ) Kalus, C.K. ( SIGMA-C GmbH (Germany) ) Schmoeller, T. ( SIGMA-C GmbH (Germany) ) Klyonova, Y. ( SIGMA-C GmbH (Germany) ) Sato, T. ( Toshiba Corp. (Japan) ) Endo, A. ( Toshiba Corp. (Japan) ) Shibata, T. ( Toshiba Corp (Japan) ) Kobayashi, Y. ( Toshiba Corp. (Japan) ) - Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part One
- Page(from):
- 101
- Page(to):
- 111
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
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