Impact of across-pupil transmittance variation in projection lenses on fine device pattern imaging
- Author(s):
- Sato, K. ( Toshiba Corp. (Japan) )
- Mimotogi, S. ( Toshiba Corp. (Japan) )
- Inoue, S. ( Toshiba Corp. (Japan) )
- Higashiki, T. ( Toshiba Corp. (Japan) )
- Publication title:
- Optical Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5040
- Pub. Year:
- 2003
- Vol.:
- Part One
- Page(from):
- 33
- Page(to):
- 44
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- Language:
- English
- Call no.:
- P63600/5040
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Measurement of transmittance variation of projection lenses depending on the light paths using a grating-pinhole mask
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Study of the impact of illumination intensity distribution on resist parameter modification
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Dependence of mask topography effects on pattern variation under hyper-NA lithography
Society of Photo-optical Instrumentation Engineers |
8
Conference Proceedings
Virtual lithography system to improve the productivity of high-mix low-volume production
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Prediction of imaging performance of immersion lithography using high refractive index fluid
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Assessment of wafer pattern prediction accuracy by introducing effectively equivalent mask patterns [6283-118]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |