Blank Cover Image

Evaluation of Litel's in-situ interferometer (ISI) technique for measuring projection-lens aberrations: an initial study

Author(s):
Bisschop, P.D. ( IMEC (Belgium) )  
Publication title:
Optical Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
Pub. Year:
2003
Vol.:
Part One
Page(from):
11
Page(to):
23
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448453 [0819448451]
Language:
English
Call no.:
P63600/5040
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings In-situ measurement of lens aberrations

Farrar,N.R., Smith,A.H., Busath,D.R., Taitano,D.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Evaluation of a backside-illuminated ISIS

H. D. Nguyen, C. Vo-Le, V. T. S. Dao, K. Takehara, T. G. Etoh

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Evaluation of coma aberration in projection lens by various measurements

Saito,T., Watanabe,H., Okuda,Y.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Impact of high-order aberrations on the performance of the aberration monitor

Dirksen,P., Juffermans,C.A., Engelen,A., Bisschop,P.De, Muellerke,H.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Measurement of lens aberration by using in-situ interferometer and classification of lens for correct application

Seong,N., Yeo,G., Cho,H., Moon,J.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Effect of lens aberrations on pattern placement error

Holscher,R.D., Baluswamy,P.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Characterization of a projection lens using the extended Nijboer-Zernike approach

Dirksen, P., Braat, J.J., De Bisschop, P., Janssen, A.J.E.M., Juffermans, C.A., Williams, A.M.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Novel aberration monitor for optical lithography

Dirksen,P., Juffermans,C.A., Pellens,R.J., Maenhoudt,M., Bisschop,P.De

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Thermal aberration control in projection lens

T. Nakashima, Y. Ohmura, T. Ogata, Y. Uehara, H. Nishinaga

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Realization of very small aberration projection lenses

Yoshihara,T., Koizumi,R., Takahashi,K., Suda,S., Suzuki,A.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings Evaluating scanner lens spherical aberration using scatterometer

Wang, C., Zhang, G., Tan, C.L., Atkinson, C., Boehm, M.A., Brown, J.M., Godfrey, D., Littau, M.E., Raymond, C.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings In-line-focus monitoring technique using lens aberration effect

Yang, H., Choi, J., Cho, B., Yim, D., Kim, J.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12