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A Simple optical system parameter optimization method by comparing the critical dimension

Author(s):
Ha, M.-A. ( Hanyang Univ. (South Korea) )
Sohn, D.-S. ( Hanyang Univ. (South Korea) )
Jun, K.-A. ( Nanyang Univ. (South Korea) )
Yoo, J.-Y. ( Hanyang Univ. (South Korea) )
Oh, H.-K. ( Hanyang Univ. (South Korea) )
Kim, J. ( Seoul National Univ. (South Korea) )
Park, I. ( Univ. of Inchon (South Korea) )
2 more
Publication title:
Advances in Resist Technology and Processing XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
1115
Page(to):
1123
Pages:
9
Pub. info.:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
Language:
English
Call no.:
P63600/5039
Type:
Conference Proceedings

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