Novel spin-bowl-compatible, wet developable bottom anti-reflective coating for i-line applications
- Author(s):
- Krishnamurthy, V.N. ( Brewer Science, Inc. (USA) )
- Neef, C.J. ( Brewer Science, Inc. (USA) )
- Turner, S.R. ( Brewer Science, Inc. (USA) )
- Publication title:
- Advances in Resist Technology and Processing XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5039
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 883
- Page(to):
- 890
- Pages:
- 8
- Pub. info.:
- Bellingham, CA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448446 [0819448443]
- Language:
- English
- Call no.:
- P63600/5039
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Second-generation radiation sensitive developable bottom anti-reflective coatings (DBARC) and implant resists approaches for 193-nm lithography
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Bottom anti-reflective coating for hyper NA process: theory, application, and material development
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings
Society of Photo-optical Instrumentation Engineers |
9
Conference Proceedings
A novel approach to developer-soluble anti-reflective coatings for 248-nm lithography
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Bottom anti-reflective coatings: fluid property characterization and wetting tendency
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
Radiation sensitive developable bottom anti-reflective coatings (DBARC) for 193nm lithography: first generation
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |