Methods to achieve sub-100-nm contact hole lithography
- Author(s):
Lindsay, T.K. ( Shipley Co. LLC (USA) ) Kavanagh, R.J. ( Shipley Co. LLC (USA) ) Pohlers, G. ( Shipley Co. LLC (USA) ) Kanno, T. ( Shipley Co. LLC (USA) ) Bae, Y.C. ( Shipley Co. LLC (USA) ) Barclay, G.G. ( Shipley Co. LLC (USA) ) Kanagasabapathy, S. ( Shipley Co. LLC (USA) ) Mattia, J. ( Shipley Co. LLC (USA) ) - Publication title:
- Advances in Resist Technology and Processing XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5039
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 705
- Page(to):
- 712
- Pages:
- 8
- Pub. info.:
- Bellingham, CA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448446 [0819448443]
- Language:
- English
- Call no.:
- P63600/5039
- Type:
- Conference Proceedings
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