Controlling line-edge rougness to within reasonable limits
- Author(s):
Cobb, J.L. ( Motorola Digital DNA Labs. (USA) ) Rauf, S. ( Motorola Digital DNA Labs. (USA) ) Thean, A. ( Motorola Digital DNA Labs. (USA) ) Dakshina-Murthy, S. ( Advanced Micro Devices, Inc. (USA) ) Stephens, T. ( Motorola Digital DNA Labs. (USA) ) Parker, C. ( Motorola Digital DNA Labs. (USA) ) Peters, R.D. ( Motorola Digital DNA Labs. (USA) ) Rao, V. ( Motorola Digital DNA Labs. (USA) ) - Publication title:
- Advances in Resist Technology and Processing XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5039
- Pub. Year:
- 2003
- Vol.:
- 1
- Pt.:
- Session 9
- Page(from):
- 376
- Page(to):
- 383
- Pages:
- 8
- Pub. info.:
- Bellingham, CA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448446 [0819448443]
- Language:
- English
- Call no.:
- P63600/5039
- Type:
- Conference Proceedings
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