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Measurement of the dielectric function spectra of low dielectric constant using the spectroscopic ellipsometry

Author(s):
Horie, M. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Postava, K. ( Technical Univ. of Ostrava (Czech Republic) )
Yamaguchi, T. ( Shizuoka Univ. (Japan) )
Akashika, K. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Hayashi, H. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Kitamura, F. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
2
Page(from):
803
Page(to):
809
Pages:
7
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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