Accuracy in CD-SEM metrology
- Author(s):
- Nikitin, A.V. ( Nanometrology LLC (USA) )
- Sicignano, A. ( Nanometrology LLC (USA) )
- Yeremin, D.Y. ( Nanometrology LLC (USA) )
- Sandy, M. ( Nanometrology LLC (USA) )
- Goldburt, E.T. ( Nanometrology LLC (USA) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5038
- Pub. Year:
- 2003
- Vol.:
- 1
- Page(from):
- 651
- Page(to):
- 662
- Pages:
- 12
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448439 [0819448435]
- Language:
- English
- Call no.:
- P63600/5038
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Nanocal calibration and pitch recertification of a Hitachi microscale standard
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
A novel and robust method for the accurate magnification characterization and calibration of out-of-fab SEM cluster tools
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Single- and three-axis geophone: footstep detection with bearing estimation, localization, and tracking
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |