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Applications of angular scatterometry for the measurement of multiply periodic features

Author(s):
Raymond, C.J. ( Accent Optical Technologies, Inc. (USA) )
Littau, M.E. ( Accent Optical Technologies, Inc. (USA) )
Youn, B.J. ( Accent Optical Technologies, Inc. (South Korea) )
Sohn, C.-J. ( Accent Optical Technologies (South Korea) )
Kim, J.A. ( Samsung Electronics Co., Ltd. (South Korea) )
Kang, Y.S. ( Samsung Electronics Co., Ltd. (South Korea) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
1
Page(from):
577
Page(to):
584
Pages:
8
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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